Two step process for the fabrication of diffraction limited concave microlens arrays
نویسندگان
چکیده
منابع مشابه
Two step process for the fabrication of diffraction limited concave microlens arrays.
A two step process has been developed for the fabrication of diffraction limited concave microlens arrays. The process is based on the photoresist filling of melted holes obtained by a preliminary photolithography step. The quality of these microlenses has been tested in a Mach-Zehnder interferometer. The method allows the fabrication of concave microlens arrays with diffraction limited optical...
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We report the fabrication of single-component, strain responsive microlens arrays with real-time tunability. The concave lens array is fabricated by patterning hard oxide layer on a bidirectionally prestretched soft elastomer, polydimethylsiloxane PDMS followed by confined buckling upon release of the prestrain. The convex microlens array is replica molded from the concave lenses in PDMS. Due t...
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‡Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, NJ 07974, USA E-mail: [email protected] Microlenses are important optical components that image, detect, and couple light. But most synthetic microlenses have fixed position and shape once they are fabricated, so their possible range of tunability and complexity is rather limited. By comparison, biology provides many...
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Convective deposition of a monolayer of microspheres by drawing a meniscus of a suspension across a substrate is used to fabricate microlens arrays to enhance the photon extraction efficiency of light emitting diodes (LEDs). The self-assembly of a colloidal crystal within the blade-drawn thin film is dominated by capillary forces and the thickness of this crystal depends on many parameters, inc...
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Soft, biomimetic microlens arrays were fabricated by interference lithography from the copolymers of poly(2-hydroxyethyl methacrylate), whose hydroxyl groups were crosslinked by photoacids and external crosslinkers. Comments For personal or professional use only; May not be further made available or distributed. Reprinted from the Journal of Materials Chemistry, Volume 15, Issue 39, 21 October ...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2008
ISSN: 1094-4087
DOI: 10.1364/oe.16.019541